Invited Talk

Invited Talk 5:

Drive and Control Technology for High Precision Linear Servo System

The direct-drive linear motion systems have been largely popularized to the industry applications, such as the precision machine tools and semiconductor equipment , due to its prominent superiority of high-velocity, high dynamic and high-precision. However, various disturbance/ uncertainty mainly caused by the endogenous parameter variation and exogenous perturbation impose large restrictions on the realization of these high-performance. Therefore, the disturbance/ uncertainty estimation and attenuation technique has aroused large interests in the industry.

In order to reach the full potential of the PMLSM-driven motion system, this speech will talk about two basic drive and control technologies for high precision linear servo system:

(1) high-bandwidth and strong robust current response method: the deadbeat predictive current control,

(2) high-precision and high-dynamic position tracking control: sliding mode control and observer.

Liyi Li (IEEE Senior Member) received the B.E., M.E., and D.E. degrees from the Harbin Institute of Technology (HIT), Harbin, China, in 1991, 1995, and 2001, respectively. Since 2004, he has been a Professor with the School of Electrical Engineering and Automation, HIT.

 

In 2013, he became “Yangtze Fund Scholar” Distinguished Professor, and he was supported by the National Science Fund for Distinguished Young Scholars. He has authored or coauthored more than 110 technical papers and is the holder of 50 patents. His research interests include design, drive and con-trol of linear motors, design and drive of high-speed/power density permanent magnet machines.